Titanium tungsten etching solution

Product Introduction

The titanium-tungsten etching solution uses acidic hydrogen peroxide as the base to etch the titanium-tungsten substrate, and can reduce the Giavanni effect between the gold bumps and the titanium-tungsten bottom layer to accelerate and effectively reduce side etching.

Operation

Operating parameters Immersion work
pH value 3.5~4.5
Temperature (℃) 25~30
Etching speed 1~5Å/sec
Achievements
鈦鎢蝕刻液成果
鈦鎢蝕刻液成果2

E-CHEM Taiwan Main Office
陳相穎 Lana Chen
Tel:+886-3-3653300 #4207
M.P:+886- 978513605
E-mail:lana.chen@echemsemi.com

E-CHEM Shanghai Corp Dongguan Office
徐世綱 Kenny Hsu
Tel:+886-3-3653300 #4203
M.P:+886- 88213093
E-mail:kenny.hsu@echemsemi.com